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Optical Microsystems

At CMST, we are pioneering cutting-edge technological solutions for high-speed optical communications and advanced biomedical sensing and stimulation.

Our research focuses on the next generation of communication, computing, and AI applications, which demand ultra-dense co-integration of electronics and photonics. This integration is crucial to support the ever-increasing bandwidth and low latency required for time-critical applications. Our solutions are designed to be scalable for volume production, energy-efficient with low optical loss, user-friendly with pluggable interfaces, and highly reliable to meet the rigorous demands of modern technology.

In the realm of biomedical devices, we emphasize the development of biocompatible, compact, safe, and durable systems. Our work on flexible optical microsystems is aimed at revolutionizing wearable and implantable devices for optical sensing and stimulation. These innovations are poised to enhance patient care through precise, real-time monitoring and targeted therapeutic interventions.

Research Areas

Photonics integration and packaging

  • Efficient light coupling for PICs
    • Microlens integration
    • High channel count PIC-PIC and PIC-fiber coupling
  • Scalable ultra-dense electronic-photonic integration
    • Electronic-photonic co-design
    • Co-packaged optics
    • Wafer-level packaging compatibility
  • Light source integration

Biomedical photonics

  • Flexible photonics
  • Light-based therapies (a.o optogenetics)
  • Optical sensing

Contact

Geert Van Steenberge
Jeroen Missinne

Research Highlights

Biomedical optics: stimulation and detection

Optogenetics: measuring brain temperature increase upon illumination

optogenetics_brain_tempearture

We measured (using a Fiber Bragg Grating sensor) and simulated the increase in brain temperature upon illumination with blue light at different irradiance values.
Acharya, Anirudh R., Bram Vandekerckhove, Lars Emil Larsen, Jean Delbeke, Wytse J. Wadman, Kristl Vonck, Evelien Carette, Alfred Meurs, Jan Vanfleteren, Paul Boon, Jeroen Missinne, and Robrecht Raedt. 2021. “In Vivo Blue Light Illumination for Optogenetic Inhibition: Effect on Local Temperature and Excitability of the Rat Hippocampus.” JOURNAL OF NEURAL ENGINEERING 18 (6). doi:10.1088/1741-2552/ac3ef4. 

Review paper: Technological challenges in the development of optogenetic closed-loop therapy approaches in epilepsy and related network disorders of the brain

We reviewed and summarized the technological Challenges in the Development of Optogenetic Closed-Loop Therapy Approaches in Epilepsy and Related Network Disorders of the Brain.
Vandekerckhove, Bram, Jeroen Missinne, Kristl Vonck, Pieter Bauwens, Rik Verplancke, Paul Boon, Robrecht Raedt, and Jan Vanfleteren. 2021. “Technological Challenges in the Development of Optogenetic Closed-Loop Therapy Approaches in Epilepsy and Related Network Disorders of the Brain.” MICROMACHINES 12 (1). doi:10.3390/mi12010038. 

3D photonic and mechanical microstructures in glass using femtosecond-laser inscription

Low-loss single mode waveguides, Bragg grating sensors and precision alignment features and devices

femtosecondresponseBGW

Laser Written Glass Interposer for Fiber Coupling to Silicon Photonic Integrated Circuits.
"A. Desmet, A. Radosavljević, J. Missinne, D. Van Thourhout and G. Van Steenberge, "Laser Written Glass Interposer for Fiber Coupling to Silicon Photonic Integrated Circuits," in IEEE Photonics Journal, vol. 13, no. 1, pp. 1-12, Feb. 2021, doi: 10.1109/JPHOT.2020.3039900."

Femtosecond laser-inscribed non-volatile integrated optical switch in fused silica based on microfluidics-controlled total internal reflection.
“Radosavljevic A, Desmet A, Missinne J, Saurav K, Panapakkam V, Tuccio S, et al. Femtosecond laser-inscribed non-volatile integrated optical switch in fused silica based on microfluidics-controlled total internal reflection. JOURNAL OF LIGHTWAVE TECHNOLOGY. 2020;38(15):3965–73.”

Electro-photonic packaging and integration

Aerosol-jet printed (AJP) high-speed chip-to-chip interconnects

EAM

Aerosol-Jet printed interconnects for 60-Gb/s CMOS driver and microring modulator transmitter assembly.
“Elmogi, A., Ramon, H., Lambrecht, J., Ossieur, P., Torfs, G., Missinne, J., De Heyn, P., et al. (2018).  IEEE Photonics Technology Letters, 30(22), 1944–1947.”

AJP

Aerosol-jet printed interconnects for 2.5 D electronic and photonic integration.
“Elmogi, A., Soenen, W., Ramon, H., Yin, X., Missinne, J., Spiga, S., Amann, M.-C., et al. (2018). JOURNAL OF LIGHTWAVE TECHNOLOGY, 36(16), 3528–3533.”

Photonic packaging

Monolithically integrated silicon microlenses for efficient and alignment-tolerant coupling from/to photonic chips

microlenses

Alignment-tolerant Interfacing of a Photonic Integrated Circuit Using Back Side Etched Silicon Microlenses.
“Missinne, J., Beneitez, N. T., Mangal, N., Zhang, J., Vasiliev, A., Van Campenhout, J., Snyder, B., Roelkens, G., and Van Steenberge, G., Alignment-tolerant interfacing of a photonic integrated circuit using back-side etched silicon microlenses, in Silicon Photonics XIV, 10923, International Society for Optics and Photonics (2019).”

Monolithic Integration of Microlenses on the Backside of a Silicon Photonics Chip for Expanded Beam Coupling
“Mangal, Nivesh, Bradley Snyder, Joris Van Campenhout, Geert Van Steenberge, and Jeroen Missinne. 2021. “Monolithic Integration of Microlenses on the Backside of a Silicon Photonics Chip for Expanded Beam Coupling.” OPTICS EXPRESS 29 (5): 7601–7615. doi:10.1364/oe.412353.”

Expanded-Beam Backside Coupling Interface for Alignment-Tolerant Packaging of Silicon Photonics
“Mangal, Nivesh, Bradley Snyder, Joris Van Campenhout, Geert Van Steenberge, and Jeroen Missinne. 2020. “Expanded-Beam Backside Coupling Interface for Alignment-Tolerant Packaging of Silicon Photonics.” IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS 26 (2). doi:10.1109/jstqe.2019.2934161.”

Back-side emitted grating couplers for use with monolithically integrated microlenses
Mangal N, Missinne J, Van Steenberge G, Van Campenhout J, Snyder B. Performance evaluation of backside emitting O-Band grating couplers for 100 μm-thick silicon photonics interposers. IEEE PHOTONICS JOURNAL . Institute of Electrical and Electronics Engineers (IEEE); 2019;11(3):1–1.

Single-mode polymer optical waveguides (down to 1x1 μm2) on large-area substrates using mask lithography, laser-direct write technology or imprinting

waveguides

Single-mode polymer optical waveguides using laser-direct write technology
“Elmogi, A., Bosman, E., Missinne, J., & Van Steenberge, G. (2016). Comparison of epoxy- and siloxane-based single-mode optical waveguides defined by direct-write lithography. OPTICAL MATERIALS, 52, 26–31.”

Single-mode polymer optical waveguides using imprinting (for sensing)
“Missinne, Jeroen, Nuria Teigell Beneitez, Marie-Aline Mattelin, Alfredo Lamberti, Geert Luyckx, Wim Van Paepegem, and Geert Van Steenberge. 2018. Sensors 18 (8): 2717–1–2717–14.”

Flexible photonics for sensing and biomedical applications

Temperature or strain sensors in thin foils (Bragg grating-based optical sensors realized using nano-imprinting lithography)

sensors

Bragg-Grating-Based Photonic Strain and Temperature Sensor Foils Realized Using Imprinting and Operating at Very Near Infrared Wavelengths.
“Missinne, Jeroen, Nuria Teigell Beneitez, Marie-Aline Mattelin, Alfredo Lamberti, Geert Luyckx, Wim Van Paepegem, and Geert Van Steenberge. 2018. Sensors 18 (8): 2717–1–2717–14.”

Thin and Flexible Polymer Photonic Sensor Foils for Monitoring Composite Structures.
“Missinne, Jeroen, Nuria Teigell Beneitez, Alfredo Lamberti, Gabriele Chiesura, Geert Luyckx, Marie-Aline Mattelin, Wim Van Paepegem, and Geert Van Steenberge. 2018. Advanced Engineering Materials 20 (2).”

Nanofabrication

Fine-pitch gratings: master fabrication and imprinting (e.g. for sensing or augmented reality)

blazedgratingsgratings

Design and fabrication of blazed gratings for a waveguide-type head mounted display.
"Mattelin, M.-A., Radosavljevic, A., Missinne, J., Cuypers, D., & Van Steenberge, G. (2020). OPTICS EXPRESS, 28(8), 11175–11190. https://doi.org/10.1364/oe.384806"

Imprinted polymer-based guided mode resonance grating strain sensors.
Mattelin, M.-A., Missinne, J., De Coensel, B., & Van Steenberge, G. (2020). SENSORS, 20(11). https://doi.org/10.3390/s20113221